Publications |
"Defects in Ge+ implanted Si studied by Slow
Positron Implantation Spectroscopy" SAE Kuna, PG Coleman, A Nejim, F Cristiano and PLF Hemment Semicon. Sci. Technol 13, 394-8 (1998) "Profile
Broadening of High Dose Germanium Implants into (100) Silicon at Elevated Temperatures due
to Channelling" "A Study of the Evolution of Carrier and Vacancy Depth Profiles with
Annealing Temperature of Si-implanted GaAs" "Open-volume defect tails in Ge-implanted Si probed by Slow
Positrons" "The equivalence of vacancy-type damage in
ion-implanted Si seen by positron annihilation spectroscopy" "Positron Spectroscopy of vacancy-type defects in Si created by 5keV B+
implantation" "Enhancement of depth sensitivity in slow positron implantation
spectroscopy of Si" "Self ion irradiated Si probed with enhanced depth resolution positron
annihilation spectroscopy" "Applying slow positrons to the study of ion implantation induced
defects in GaAs" "Diagnostic measurement of ion implantation dose and uniformity with a
laboratory-based positron probe" "Low temperature annealing of 4H-SiC Schottky diode edge
terminations formed by 30 keV Ar+ implantation" "Development of a novel tool for semiconductor process
control" "The study of lattice damage using slow
positrons following low-energy B+ implantation of silicon" "Development of a novel tool for semiconductor
process control" "Growth temperature dependence for the formation
of vacancy clusters in Si/Si0.64/Ge0.36/Si
structures" "Simple expression for vacancy concentrations at
half ion range following MeV ion implantation of silicon" "At-temperature annealing of near-surface
vacancy-type defects observed by positronium formation spectroscopy" "Room-temperature evolution of vacancy-type
damage created by 2 keV B+ implantation of Si" "Positron annihilation spectroscopy as a
diagnostic tool for process monitoring of buried oxide layer formation in
Si" "Oxygen-related vacancy-type defects in
ion-implanted silicon studied by positron annihilation spectroscopy" "Positron annihilation spectroscopy of the
interface between nanocrystalline Si and SiO2" "Characterization of the nc-Si/SiO2
interface region during the agglomeration of nc-Si" Invited published papers "Current trends in ion implantation"
Review paper "Recent advances in the application of slow
positron beams to the study of ion implantation defects in silicon"
Conference proceedings "A new tool for nondestructive monitoring of ion
implantation" "Effect of Residual damage on carrier transport
properties in a 4H-SiC double implanted bipolar junction transistor" "Slow Positron Beams – a versatile tool for
studying ion implantation defect related phenomena" "Construction and Performance of
a Bench-top Mapping Positron Alpha Tool" "Nanocrystalline Si studied by beam-based
positron annihilation spectroscopy" "Sensitivity of Positron Annihilation
Spectroscopy to Energy Contamination in Low Energy Boron Ion
Implantation"
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