TY  - CONF
T1  - Electrode patterning on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications
A1  - Kloss,S.
A1  - Lewis,R.W.C.
A1  - Dent,A.C.E.
A1  - Weston,N.
A1  - Jonas,K.
A1  - Bowen,C.R.
A1  - Hand,D.P.
A1  - Shephard,J.D.
Y1  - 2009///
KW  - Design
KW  - Electrode
KW  - Laser
KW  - Piezoelectric
KW  - PZT
SP  - 14
EP  - 14
JF  - Program of ICALEO 2009 - 28th International Congress on Applications of Lasers & Electro-Optics
T2  - ICALEO 2009 - 28th International Congress on Applications of Lasers & Electro-Optics
CY  - Orlando FL, USA
PB  - Laser Institute of America
N2  - This paper discusses the formation of complex electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.
Y2  - 2009/11/02/
M2  - Orlando FL, USA
ER  -